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Three-dimensional characterization of extreme ultraviolet mask blank defects by interference contrast photoemission

Jingquan Lin1, Nils Weber, Matthias Escher

  • 1Faculty of Physics, Ludwig Maximilians University, Munich, D 85748, Germany. Jingquan.lin@physik.uni-muenchen.de

Optics Express
|October 1, 2008
PubMed

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A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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In 1931, physicist Ernst Ruska—building on the idea that magnetic fields can direct an electron beam just as lenses can direct a beam of light in an optical microscope—developed the first prototype of the electron microscope. This development led to the development of the field of electron microscopy. In the transmission electron microscope (TEM), electrons are produced by a hot tungsten element and accelerated by a potential difference in an electron gun, which gives them up to 400 keV in...