Dynamics of microring resonator modulators

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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
09:46

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

Wesley D Sacher1, Joyce K S Poon

  • 1Department of Electrical and Computer Engineering and Institute for Optical Sciences, University of Toronto, Toronto, Ontario, M5S 3G4, Canada. wesley.sacher@utoronto.ca

Optics Express
|October 1, 2008
PubMed

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