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Updated: Jun 30, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
15:25

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

Short-wavelength MEMS-tunable VCSELs.

Garrett D Cole1, Elaine Behymer, Tiziana C Bond

  • 1Center for Micro- and Nanotechnologies, Lawrence Livermore National Laboratory, Livermore, CA 94550, USA. cole35@llnl.gov

Optics Express
|October 1, 2008
PubMed
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We developed new tunable semiconductor lasers for gas sensing near the oxygen A-band. These microelectromechanical systems (MEMS) lasers offer fast tuning speeds and a wide wavelength range for improved optical detection.

Area of Science:

  • Optoelectronics
  • Semiconductor Lasers
  • Optical Sensing

Background:

  • Wavelengths below 800 nm, particularly near the oxygen A-band (760-780 nm), are crucial for absorption-based optical gas sensing.
  • Existing tunable laser technologies may lack the speed or monolithic integration required for advanced sensing applications.

Purpose of the Study:

  • To present electrically-injected microelectromechanical systems (MEMS)-tunable vertical-cavity surface-emitting lasers (VCSELs) operating below 800 nm.
  • To demonstrate the suitability of these lasers for absorption-based optical gas sensing near the oxygen A-band.
  • To investigate the tuning characteristics, including speed and range, of these novel devices.

Main Methods:

  • Fabrication of fully-monolithic oxide-aperture AlGaAs epitaxial structures.

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  • Integration of a suspended dielectric Bragg mirror for wavelength tuning via electrostatic actuation.
  • Characterization of laser performance, including emission wavelength, tuning range, and tuning rate.

    • Main Results:

    • Demonstrated electrically-injected MEMS-tunable VCSELs with emission wavelengths below 800 nm.
    • Achieved a wide wavelength tuning range of 30 nm (767-737 nm).
    • Showcased potential for high tuning rates up to 1 MHz using electrostatic actuation.

    Conclusions:

    • The developed MEMS-tunable VCSELs are highly promising for absorption-based optical gas sensing applications, especially near the oxygen A-band.
    • The combination of monolithic integration, wide tuning range, and high tuning speed offers significant advantages for advanced spectroscopic sensing.