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Updated: Jun 29, 2026

Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
Fenglei Tian1, Xiaoping Qian, J S Villarrubia
1Mechanical, Materials and Aerospace Engineering, Illinois Institute of Technology, Chicago, IL 60616, USA. ftian1@iit.edu
Advanced atomic force microscopes (AFM) can now image complex surfaces. This study introduces a new method to accurately estimate the 3D tip shape, correcting image distortions for better surface analysis.
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