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Updated: Jun 29, 2026

Fabrication of Ti3C2 MXene Microelectrode Arrays for In Vivo Neural Recording
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Sputtered iridium oxide films for neural stimulation electrodes.

Stuart F Cogan1, Julia Ehrlich1, Timothy D Plante1

  • 1EIC Laboratories, Norwood, Massachusetts 02062.

Journal of Biomedical Materials Research. Part B, Applied Biomaterials
|October 8, 2008
PubMed
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Sputtered iridium oxide films show promise for neural electrodes. These films offer high charge-injection capacities, comparable to activated iridium oxide films, for neural recording and stimulation applications.

Area of Science:

  • Materials Science
  • Neuroscience
  • Biomedical Engineering

Background:

  • Neural electrodes require materials with high charge-injection capacity for safe and effective neural recording and stimulation.
  • Iridium oxide films are known for their electrochemical properties, but sputtered iridium oxide films (SIROFs) require further characterization for neural applications.

Purpose of the Study:

  • To characterize sputtered iridium oxide films (SIROFs) for their potential use as neural recording and stimulation electrodes.
  • To evaluate the charge-injection capacities and electrochemical properties of SIROFs under various conditions.

Main Methods:

  • SIROFs were deposited onto flexible polyimide-based multielectrode arrays using DC reactive sputtering.
  • Charge-injection capacities were measured in an inorganic interstitial fluid model using charge-balanced, cathodal-first current pulses.

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Last Updated: Jun 29, 2026

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  • Electrode impedance and interpulse bias current were also determined as a function of SIROF thickness and electrode area.

    • Main Results:

    • SIROFs exhibited charge-injection capacities ranging from 1-9 mC/cm(2), comparable to activated iridium oxide films (AIROFs).
    • Charge injection capacity was dependent on pulse parameters (width, bias) and electrode area.
    • Impedance and interpulse bias current showed dependence on SIROF thickness.

    Conclusions:

    • Sputtered iridium oxide films are a viable material for neural electrodes due to their high charge-injection capacity.
    • SIROFs offer comparable performance to AIROFs, suggesting their potential for advanced neural interfaces.
    • Further optimization of SIROF deposition and electrode design can enhance their suitability for neural recording and stimulation.