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Updated: Jun 29, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Shien Ri1, Motoharu Fujigaki, Yoshiharu Morimoto
1Department of Nanomechanics, Graduate School of Engineering, Tohoku University, Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan. rishien@ism.mech.tohoku.ac.jp
This study introduces a new method using a digital micromirror device (DMD) camera to improve 3D shape measurements. It significantly reduces errors from underexposed or overexposed areas in phase-measuring profilometry.
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Published on: December 1, 2016
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