Transmission-type angle deviation microscopy

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Updated: Jun 29, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
10:25

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

Ming-Hung Chiu1, Chih-Wen Lai, Chen-Tai Tan

  • 1Department of Electro-Optical Engineering, National Formosa University, 64 Wunhua Road, Huwei Yunlin 632, Taiwan. mhchiu@nfu.edu.tw

Applied Optics
|October 11, 2008
PubMed

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