Effect of transport of growing nanoparticles on capacitively coupled rf discharge dynamics

I V Schweigert1, A L Alexandrov, D A Ariskin

  • 1Institute of Theoretical and Applied Mechanics, Russian Academy of Sciences, Novosibirsk 630090, Russia.

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A parallel-plate capacitor with capacitance C, whose plates have area A and separation distance d, is connected to a resistor R and a battery of voltage V. The current starts to flow at t = 0. What is the displacement current between the capacitor plates at time t? From the properties of the capacitor, what is the corresponding real current?
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