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Updated: Jun 28, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Low-cost virtual instrumentation system of an energy-dispersive X-ray spectrometer for a scanning electron microscope
Junfeng Lei1, Libo Zeng, Ronggui Liu
1Department of Analysis-Measurement Science, Wuhan University, Wuhan 430072, PR China.
Abstract:
The paper describes an energy-dispersive X-ray spectrometer for a scanning electron microscope (SEM-EDXS). It was constructed using the new architecture of a virtual instrument (VI), which is low-cost, space-saving, fast and flexible way to develop the instrument. Computer-aided teaching (CAT) was used to develop the instrument and operation rather than a traditional instrument technique. The VI was designed using the object-oriented program language C++ and compact programmable logical devices (CPLD). These include spectra collection and processing, quantitative analysis and X-ray-intensity distribution analysis. The procedure is described in detail. The VI system gives an e inverted exclamation markective and user-friendly human interface for the whole analytical task. Some examples are described.
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