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Standing Waves in a Cavity01:28

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A household microwave and lasers are examples of standing electromagnetic waves in a cavity. When two conducting metal plates are placed parallel at the nodal planes, it creates a cavity where standing waves are formed. The cavity between the two planes is analogous to a stretched string held at the points x = 0 and x = L. Here, the distance 'L' between the two planes must be an integer multiple of half of the wavelength. The wavelengths that satisfy this condition are given by:

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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Vertical multiple-slot waveguide ring resonators in silicon nitride.

Laurent Vivien1, Delphine Marris-Morini, Amadeu Griol

  • 1Institut d'Electronique Fondamentale, CNRS UMR 8622, Université Paris-Sud 11, Orsay cedex, France. Laurent.vivien@u-psud.fr

Optics Express
|October 30, 2008
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Summary

This study demonstrates novel vertical multiple-slot silicon nitride waveguides for ring resonators. These devices achieve high quality factors for both TE and TM polarizations at 1.3 microm wavelength.

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Area of Science:

  • Photonics and Optical Engineering
  • Materials Science

Background:

  • Silicon nitride (SiN) waveguides are crucial for integrated photonics.
  • Multiple-slot waveguide designs offer enhanced light confinement and control.
  • Ring resonators are fundamental components for optical filtering and sensing.

Purpose of the Study:

  • To demonstrate the first vertical multiple-slot silicon nitride waveguide ring resonators.
  • To investigate the performance of these resonators across various coupling distances and radii.
  • To evaluate device performance for both TE and TM polarizations at 1.3 microm.

Main Methods:

  • Design and fabrication of vertical multiple-slot silicon nitride waveguide ring resonators.
  • Experimental measurements of resonator performance.
  • Characterization of quality factors for TE and TM polarizations.
  • Testing with varying ring radii (70, 90, 110 microm) and coupling distances.

Main Results:

  • Successful fabrication of vertical multiple-slot silicon nitride waveguide ring resonators.
  • Achieved quality factors of 6,100 for TE polarization.
  • Achieved quality factors of 16,000 for TM polarization.
  • Demonstrated performance at a wavelength of 1.3 microm.

Conclusions:

  • Vertical multiple-slot silicon nitride waveguides are a viable platform for high-performance ring resonators.
  • The demonstrated devices show promise for integrated photonic applications requiring efficient light manipulation.
  • The results highlight the potential of this technology for advanced optical circuits.