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Updated: Jun 28, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Laurent Vivien1, Delphine Marris-Morini, Amadeu Griol
1Institut d'Electronique Fondamentale, CNRS UMR 8622, Université Paris-Sud 11, Orsay cedex, France. Laurent.vivien@u-psud.fr
This study demonstrates novel vertical multiple-slot silicon nitride waveguides for ring resonators. These devices achieve high quality factors for both TE and TM polarizations at 1.3 microm wavelength.
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