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Updated: Jun 28, 2026
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Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
Published on: December 21, 2015
Investigation of phase-growth kinetics during interaction of silicon single crystals and molybdenum thin films
B I Fomin1, A E Gershinskii, E I Cherepov
1Institute of Semiconductor Physics, Academy of Sciences of the USSR, Siberian Branch, Novosibirsk, U.S.S.R.
Talanta
|January 1, 1977
Abstract:
Investigation of the phase-growth kinetics and identification of the phases formed as a result of reactive diffusion in the system of Si single crystals and Mo thin films, has been carried out by electrochemical anodic etching.
