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Updated: Jun 28, 2026

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
Published on: April 29, 2020
A comparison between secondary-ion mass-spectrometry and spark-source mass-spectrometry for the quantitative analysis
M Van Craen1, J Verlinden, R Gijbels
1Department of Chemistry, University of Antwerp (U.I.A.), Universiteitsplein 1, B-2610 Wilrijk, Belgium.
Abstract:
A comparison has been made between the results of the matrix-ion species ratio (MISR) method for quantification of secondary-ion mass-spectrometry data and spark-source mass-spectrometry analysis using photoplate detection for analysis of the steel basis of AlZn coated wire products. For SIMS quantification a suitable set of sensitivity factors, corrected for the actual surface sampling condition, was used. The results of both methods compare well. The SIMS results were, for most elements, within 25% of the concentration determined by SSMS. This could indicate that reasonably accurate results can be obtained by using the matrix-ion species ratio method for SIMS.
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