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Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles

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Published on: March 6, 2016

Modified mason model for bulk acoustic wave resonators.

Tiberiu Jamneala¹, Paul Bradley, Uli B Koelle

¹Avago Technologies, Wireless Semiconductor Division, San Jose, CA, USA. tiberiu.jamneala@avagotech.com

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

|November 7, 2008

Summary

This study introduces a Modified Mason Model to accurately simulate parasitic modes in bulk acoustic wave resonators, improving frequency response modeling for 3D structures. The enhanced model provides precise predictions validated by experimental filter measurements.

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Area of Science:

Electrical Engineering
Acoustic Physics

Background:

Current 1-D models for bulk acoustic wave (BAW) resonators struggle to simulate parasitic modes in realistic 3D structures, limiting frequency response accuracy.
Parasitic modes can significantly impact the performance of BAW devices, necessitating improved modeling techniques.

Purpose of the Study:

To develop a simple yet accurate method for simulating parasitic modes in BAW resonators.
To enhance the predictive capabilities of existing 1-D resonator models for complex 3D structures.
To validate the proposed model against experimental data.

Main Methods:

A modified 1-D Mason Model was developed by incorporating a coupling term between the fundamental mode and parasitic modes.
The Modified Mason Model was designed to handle resonators with arbitrary impedance and resonating frequencies.
The model's simulation results were compared with on-wafer measurements of a ladder-type filter.

Main Results:

The Modified Mason Model successfully simulates parasitic modes that are not captured by traditional 1-D models.
The model demonstrates accurate prediction of frequency response for resonators with varied impedance and resonating frequencies.
The model's predictions closely matched the on-wafer measurements of a ladder-type filter, confirming its efficacy.

Conclusions:

The proposed Modified Mason Model offers a significant improvement over existing 1-D models for BAW resonator frequency response.
This technique enables accurate simulation of parasitic modes, crucial for designing high-performance BAW filters and devices.
The model provides a valuable tool for researchers and engineers working with advanced acoustic wave resonator technologies.