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Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices

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Dedicated finite elements for electrode thin films on quartz resonators.

Sonal A Srivastava¹, Yook-Kong Yong, Masako Tanaka

¹Dept. of Civil & Environ. Eng., Rutgers Univ., Piscataway, NJ, USA. sonalsri@gmail.com

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

|November 7, 2008

Summary

Finite element analysis for quartz resonators requires fine meshes, increasing computational demands. New methods for modeling electrode films reduce problem size and improve accuracy for thickness shear resonators.

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Area of Science:

Physics
Materials Science
Electrical Engineering

Background:

Finite element analysis (FEA) accuracy for thickness shear quartz resonators depends on mesh resolution, demanding significant computational resources.
Electrode elements in FEA often have poor aspect ratios due to their small thickness, negatively impacting solution accuracy.
High memory requirements for fine meshes can exceed available computational capacity.

Purpose of the Study:

To propose and evaluate novel methods for modeling electrode films in AT cut quartz resonators.
To reduce the computational problem size and improve the accuracy of FEA for quartz resonators.
To investigate the impact of electrode film boundary conditions on resonator frequency-temperature characteristics.

Main Methods:

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Experimental data collection on frequency-temperature curves of AT cut plates with varying electrode film boundary conditions.

Finite element analysis (FEA) on resonator models with different mesh resolutions and electrode modeling techniques.

Application of approximations like lumping and Guyan reduction for modeling thin electrode films.

Introduction and study of a new 'merging' approximation for electrode modeling.

Main Results:

Experimental results demonstrate the significant influence of electrode film boundary conditions on frequency-temperature curves.
FEA validation confirms the accuracy of the proposed methods in representing resonator behavior.
The proposed methods effectively reduce the overall problem size and eliminate problematic electrode element aspect ratios.
The 'merging' approximation shows promise in accurately modeling electrodes at the crystal interface.

Conclusions:

Specialized methods for modeling electrode films are crucial for accurate and efficient FEA of quartz resonators.
The proposed techniques, including 'merging', offer a viable solution to computational limitations and accuracy issues.
Accurate modeling of electrode interfaces is essential for predicting the performance of AT cut quartz resonators.