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Two step process for the fabrication of diffraction limited concave microlens arrays
Patrick Ruffieux1, Toralf Scharf, Irène Philipoussis
1Institute of Microtechnology, University of Neuchâtel, Rue Breguet 2, CH-2000 Neuchâtel, Switzerland. Patrick.Ruffieux@unine.ch
Optics Express
|November 26, 2008
Summary
A novel two-step method fabricates high-quality concave microlens arrays. This process achieves diffraction-limited optical performance for applications like optical diffusers.
Area of Science:
- Optics and Photonics
- Materials Science
- Nanofabrication
Background:
- Microlens arrays are crucial optical components.
- Existing fabrication methods face limitations in achieving high optical quality and precise control.
Purpose of the Study:
- To develop a robust and efficient method for fabricating diffraction-limited concave microlens arrays.
- To demonstrate the optical performance and versatility of the fabricated microlenses.
Main Methods:
- A two-step process involving photolithography to create melted holes, followed by photoresist filling.
- Testing microlens quality using a Mach-Zehnder interferometer.
Main Results:
- Successful fabrication of concave microlens arrays with diffraction-limited performance.
- Demonstrated microlenses with diameters from 30 to 230 micrometers and numerical apertures up to 0.25.
- Created optical diffusers using randomly sized and positioned concave microlenses.
Conclusions:
- The developed method enables the fabrication of high-performance concave microlens arrays.
- The technique offers precise control over microlens parameters for various optical applications.
- This fabrication process is suitable for creating custom optical diffusers and other advanced optical elements.
