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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
10:28

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

Polarization analysis by off-axis digital holography with an improved optical system and an evaluation of its

Masayuki Yokota1

  • 1Department of Electronic and Control Systems Engineering, Interdisciplinary Faculty of Science and Engineering,Shimane University, 1060 Nishikawatsu-cho, Matsue, Shimane 690-8504, Japan. yokota@ecs.shimane-u.ac.jp

Applied Optics
|November 28, 2008
PubMed

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