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Updated: Jan 25, 2026

Fabrication of Zero Mode Waveguides for High Concentration Single Molecule Microscopy
Published on: May 12, 2020
Channel plasmon polariton propagation in nanoimprinted V-groove waveguides
Rasmus B Nielsen1, Irene Fernandez-Cuesta, Alexandra Boltasseva
1DTU Fotonik-Department of Photonics Engineering, Nano DTU, Technical University of Denmark, Building 343, DK-2800 Kongens Lyngby, Denmark. rbni@fotonik.dtu.dk
Abstract:
We present the results of optical characterization of metal V-groove waveguides using scanning near-field microscopy, showing broadband transmission with subwavelength confinement and propagation lengths exceeding 100 microm. An updated fabrication method using a combination of UV and nanoimprint lithography is presented. The developed approach is mass-production compatible, adaptable to different designs, and offers wafer-scale parallel fabrication of plasmonic components based on profiled metal surfaces.

