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Updated: Jun 27, 2026

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
Published on: August 1, 2017
Measuring the temperature of microparticles in plasmas
Horst Maurer1, Ralf Basner, Holger Kersten
1INP Greifswald, Felix-Hausdorff-Str. 2, D-17489 Greifswald, Germany. maurer@physik.uni-kiel.de
Abstract:
Temperature sensitive features of particular phosphors were utilized for measuring the temperature T(p) of microparticles, confined in the sheath of a rf plasma. The experiments were performed under variation of argon pressure and rf power of the process plasma. T(p) has been determined by evaluation of characteristic fluorescent lines. The results for T(p) measurements are strongly dependent on rf power and gas pressure.
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