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Related Experiment Video

Updated: Jun 27, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Published on: February 27, 2013

Advanced interferometric profile measurements through refractive media.

Stephan T Koev¹, Reza Ghodssi

¹MEMS Sensors and Actuators Laboratory (MSAL), Department of Electrical and Computer Engineering, Institute for Systems Research, University of Maryland, College Park, Maryland 20742, USA.

The Review of Scientific Instruments

|December 3, 2008

Summary

This study modified an optical profiler for microelectromechanical systems (MEMS) characterization through liquids or glass. The enhanced coherence length allows accurate topographic measurements in challenging environments.

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Area of Science:

Optical metrology
Microfabrication and Nanotechnology

Background:

Optical profilers are essential for microelectromechanical systems (MEMS) characterization using techniques like phase sifting interferometry (PSI).
Measuring MEMS in liquid or through glass packaging is crucial for emerging applications but is hindered by degraded interference contrast due to refractive media.

Purpose of the Study:

To adapt an optical profiler for reliable PSI measurements through transparent refractive media.
To demonstrate a method applicable to various optical profilers and refractive materials.

Main Methods:

Modification of a Veeco NT1100 optical profiler by replacing the illumination source with a custom narrow linewidth source.
Utilizing the enhanced coherence length to improve interference contrast through water and glass.
Comparing measurements of samples in refractive media with those of uncovered samples.

Main Results:

Successful PSI measurements were achieved through 3 mm of water and 500 µm of glass.
The measurement precision was only slightly reduced by the presence of water or glass.
The modified profiler maintained sufficient precision for typical MEMS applications.

Conclusions:

The developed method enables optical profiler measurements through refractive media, overcoming a significant limitation in MEMS characterization.
This modification offers a practical solution for analyzing MEMS devices in diverse operational or packaging conditions.
The technique is adaptable for various types and thicknesses of transparent materials.