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Mass Analyzers: Common Types01:19

Mass Analyzers: Common Types

The quadrupole mass analyzer consists of four cylindrical metal rods arranged in a diamond carrying a DC voltage and a radio-frequency AC voltage. The motion of ions through the quadrupole depends on the field strength, causing only ions of a certain m/z to resonate successfully and strike the detector at a given field strength. Though the transmission rate for these analyzers is high, the exact elemental composition of the sample is not determined because of low resolution; however, they are...

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Quartz microbalance device for transfer into ultrahigh vacuum systems.

F Stavale1, H Niehus, C A Achete

  • 1Divisão de Metrologia de Materiais, Inmetro, CEP 25250-020, Xerém, Duque de Caxias, Rio de Janeiro, Brazil. flstavale@inmetro.gov.br

The Review of Scientific Instruments
|December 3, 2008
PubMed
Summary

A new quartz microbalance device enables precise flux calibration in ultrahigh vacuum (UHV) systems. This advancement is crucial for accurate thin film deposition and material evaporation processes.

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Area of Science:

  • Materials Science
  • Vacuum Technology
  • Surface Science

Background:

  • Accurate flux calibration is essential for reproducible thin film deposition.
  • Existing methods for in-situ calibration in ultrahigh vacuum (UHV) can be cumbersome.
  • Material evaporation requires precise control over deposition rates.

Purpose of the Study:

  • To develop a simple and transferable quartz microbalance device for UHV systems.
  • To enable accurate flux calibration of various material evaporators.
  • To demonstrate the device's capability for monolayer and submonolayer deposition calibration.

Main Methods:

  • Development of a quartz microbalance device compatible with UHV systems.
  • Integration of the device onto a commercial specimen holder for easy transfer.
  • Positioning the device precisely at the sample location for calibration.
  • Demonstration using vanadium depositions.

Main Results:

  • The developed quartz microbalance is easily transferable into UHV systems.
  • The device allows for precise positioning near the sample stage.
  • Calibration sensitivity achieved was less than 0.001 monolayer (ML) coverage for vanadium.
  • The system facilitates in-situ loading of experimental specimens.

Conclusions:

  • The uncomplicated quartz microbalance device is highly effective for UHV flux calibration.
  • This technology enhances the accuracy and reproducibility of thin film deposition.
  • The device offers a practical solution for calibrating material evaporators in UHV environments.