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Updated: Jun 27, 2026

In Situ SIMS and IR Spectroscopy of Well-defined Surfaces Prepared by Soft Landing of Mass-selected Ions
Published on: June 16, 2014
Development of soft plasma ionization (SPI) source for analysis of organic compounds
Hyunkook Park1, Ickhee Lee, Kyu Seong Choi
1Institute for Materials Research, Tohoku University, Katahira 2-1-1, Sendai 980-8577, Japan. parking8@imr.tohoku.ac.jp
Abstract:
We present a newly designed soft plasma ionization (SPI) source developed for mass spectrometric study of organic compounds in this study. The SPI cell having a relatively small size consists of a hollow anode and a hollow mesh cathode. The voltage-current characteristic depending on the pressure was investigated, indicating that it has similar characteristics to conventional hollow cathode glow discharges. To investigate the emission characteristics of the SPI source, some molecular band emission spectra (N(2), N(2)(+) and OH(+)) were measured by using argon and helium discharge gases. The SPI source was installed to a commercially used quadrupole mass analyzer for analyzing organic compounds. To demonstrate the SPI source, the mass spectra of some organic compounds (methylene chloride, toluene, benzene, cyclohexane and chloroform) were measured. The organic compounds were ionized with good stability in the plasma, and the fragmentation depended on the applied current. When helium and argon gases were used as the discharge gas, the helium plasma was more suitable for SPI-MS rather than argon because the argon plasma not only suffers from spectral interference but also has lower sensitivity.
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