Method for determining full-field absolute phases in the common-path heterodyne interferometer with an electro-optic

Yen-Liang Chen1, Der-Chin Su

  • 1Department of Photonics, Institute of Electro-Optical Engineering, National Chiao-Tung University, Hsinchu, Taiwan.

Applied Optics
|December 17, 2008
PubMed
Summary

A new algorithm converts electro-optic modulator interference signals into continuous waves for precise absolute phase measurement across all pixels. This method enables accurate full-field phase determination, enhancing optical metrology applications.