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Quantitative HRTEM analysis of FIB prepared specimens.

M Baram¹, W D Kaplan

¹Department of Materials Engineering, Technion - Israel Institute of Technology, Haifa 32000, Israel.

Journal of Microscopy

|December 20, 2008

Summary

Preparing transmission electron microscopy (TEM) specimens with minimal damage is challenging. This study introduces a novel focused ion beam (FIB) method using low energy ions and a low incident angle for improved TEM sample preparation.

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Area of Science:

Materials Science
Nanotechnology
Microscopy

Background:

Transmission electron microscopy (TEM) specimen preparation is crucial for accurate analysis.
Conventional focused ion beam (FIB) milling can introduce significant irradiation damage.
Achieving high-quality, damage-free specimens, especially from specific sample areas, remains a challenge.

Purpose of the Study:

To propose a novel FIB-based approach for preparing high-quality TEM specimens.
To minimize milling-induced irradiation damage during TEM specimen preparation.
To enable quantitative high-resolution TEM (HRTEM) analysis on prepared samples.

Main Methods:

Utilized a focused ion beam (FIB) system for specimen preparation.
Employed low energy (5 kV) Gallium (Ga) ions.
Used a low incident ion angle (approx. 1 degree) from an initial thickness of approx. 500 nm until electron transparency.

Main Results:

TEM specimens prepared with the novel method exhibited significantly reduced irradiation damage.
Successful quantitative high-resolution TEM (HRTEM) was performed on sapphire specimens.
Data acquisition utilized an aberration-corrected field emission gun TEM.

Conclusions:

The proposed low-energy, low-angle FIB milling technique is effective for minimizing TEM specimen damage.
This method facilitates advanced quantitative analysis, such as iterative digital image matching, on delicate materials.
The study demonstrates the feasibility of obtaining high-quality TEM specimens for detailed microstructural investigations.