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A six-DOF prismatic-spherical-spherical parallel compliant nanopositioner

Tung-Li Wu1, Jia-Hao Chen, Shuo-Hung Chang

  • 1Department of Mechanical Engineering, National Taiwan University, Taiwan, ROC.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|January 8, 2009
PubMed

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