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Probing technique using circular motion of a microsphere controlled by optical pressure for a nanocoordinate
Masaki Michihata1, Yuto Nagasaka, Terutake Hayashi
1Mechanical Engineering, Osaka University, Yamadaoka, Suita, Osaka, Japan. michihata@optim.mech.eng.osaka-u.ac.jp
Applied Optics
|January 13, 2009
Summary
A novel nanocoordinate measuring system uses an optically-trapped microsphere
Area of Science:
- Metrology
- Nanotechnology
- Optical Physics
Background:
- Accurate surface characterization is crucial for advanced manufacturing and scientific research.
- Existing nanocoordinate measuring systems face limitations in precision and non-contact capabilities.
Purpose of the Study:
- To introduce a new surface probing technique for nanocoordinate metrology.
- To demonstrate the capability of detecting surface position and normal vector direction using optical trapping.
Main Methods:
- Employing an optically-trapped microsphere undergoing circular motion.
- Monitoring the microsphere's orbital path for deviations caused by surface proximity.
- Analyzing changes in the orbit (elliptical deformation) to extract surface information.
Main Results:
- Achieved a position detection resolution of 39 nm.
- Demonstrated an accuracy of approximately 3 degrees for measuring the surface normal vector.
- The technique relies on the transformation of the microsphere's circular orbit into an elliptical path upon approaching the surface.
Conclusions:
- The proposed circular motion probe offers a viable method for high-resolution, non-contact surface metrology.
- This technique has potential applications in precision engineering, semiconductor manufacturing, and micro-assembly.
