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Updated: Jun 26, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Optical resonant sensors: a method to reduce the effect of thermal drift
Thanh Le1, Anatoliy Savchenkov, Nan Yu
1Jet Propulsion Laboratory, California Institute of Technology, 4800 Oak Grove Drive, Pasadena, California 91109, USA. Thanh.M.Le@jpl.nasa.gov
Abstract:
The use of a whispering gallery mode (WGM) resonator with an ultrahigh quality factor Q is promising in highly sensitive, label-free, lab-on-a-chip sensor applications. We investigated a novel method of using the differential frequency of TE and TM modes to reduce the thermal noise baseline, which commonly limits the sensitivity of WGM sensors. We studied the temperature dependence of WGM based sensors and experimentally demonstrated the reduction of temperature fluctuation and thus a significant improvement in the practical sensor detection limit.

