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Paired circularly polarized heterodyne ellipsometer
Chih-Jen Yu1, Chu-En Lin, Li-Ping Yu
1Department of Optics and Photonics, National Central University, Jhongli, Taiwan 320.
Applied Optics
|February 3, 2009
Summary
We developed a paired circularly polarized heterodyne ellipsometer (PCPHE) for enhanced thin film measurements. This amplitude-sensitive ellipsometer offers higher sensitivity and a wider dynamic range than traditional methods.
Area of Science:
- Optics and Photonics
- Materials Science
- Metrology
Background:
- Ellipsometry is a key technique for thin film characterization.
- Conventional photometric ellipsometers have limitations in sensitivity and dynamic range.
- Precise measurement of thin film thickness is crucial in semiconductor manufacturing.
Purpose of the Study:
- To develop a novel paired circularly polarized heterodyne ellipsometer (PCPHE).
- To enhance detection sensitivity and dynamic range compared to existing ellipsometers.
- To enable real-time and precise measurement of ellipsometric parameters.
Main Methods:
- Setup of a heterodyne interferometer using a two-frequency circularly polarized laser beam.
- Classification as an amplitude-sensitive ellipsometer.
- Real-time data acquisition and analysis.
Main Results:
- The PCPHE demonstrated higher detection sensitivity.
- A wider dynamic range of polarization modulation frequency was achieved.
- Accurate thickness measurements of SiO(2) thin films on silicon substrates with <1 nm accuracy were performed.
Conclusions:
- The developed PCPHE offers significant advantages over conventional photometric ellipsometers.
- The instrument enables precise, real-time ellipsometric measurements.
- PCPHE is suitable for critical applications like thin film thickness metrology in semiconductor industries.
