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Conducting Multiple Imaging Modes with One Fluorescence Microscope

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Published on: October 28, 2018

Soft x-ray microscope constructed with a PMMA phase-reversal zone plate.

Jong Ju Park¹, Deuk Su Kim, Sang Chul Jeon

¹Department of Physics, Coherent X-ray Research Center, KAIST, Daejeon, Korea.

|February 3, 2009

Summary

A new soft x-ray microscope achieved over 100 nm resolution using a phase-reversal zone plate and high harmonic radiation. This advancement enhances imaging capabilities for nanoscale scientific research.

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Area of Science:

Optics and Photonics
Materials Science
Nanotechnology

Background:

Soft x-ray microscopy offers high resolution for nanoscale imaging.
Coherent light sources are crucial for advanced microscopy techniques.
Zone plates are key diffractive optical elements for focusing x-rays.

Purpose of the Study:

To construct and evaluate a novel soft x-ray microscope.
To utilize high harmonic radiation as a coherent light source.
To improve the efficiency and resolution of x-ray microscopy.

Main Methods:

A phase-reversal zone plate was fabricated using polymethyl methacrylate.
High harmonic radiation (61st harmonic, 13.3 nm) was generated and optimized.
The microscope's performance was tested by imaging nano patterns onto an x-ray CCD.

Main Results:

The phase-reversal zone plate more than doubled the first-order efficiency.
The soft x-ray microscope achieved a resolution better than 100 nm.
Nano patterns were successfully imaged with a magnification of 650x.

Conclusions:

The developed soft x-ray microscope demonstrates significant potential for nanoscale imaging.
Phase-reversal zone plates are effective in enhancing x-ray microscope efficiency.
The combination of high harmonic radiation and advanced zone plates pushes the boundaries of x-ray microscopy resolution.