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Related Experiment Video

Updated: Jun 26, 2026

Implementation of a Reference Interferometer for Nanodetection
16:11

Implementation of a Reference Interferometer for Nanodetection

Published on: April 26, 2014

Simple heterodyne laser interferometer with subnanometer periodic errors.

Ki-Nam Joo1, Jonathan D Ellis, Jo W Spronck

  • 1Mechatronic System Design, Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, The Netherlands. k.joo@tudelft.nl

Optics Letters
|February 3, 2009
PubMed
Summary
This summary is machine-generated.

This study presents a simple heterodyne laser interferometer with subnanometer periodic errors, suitable for industrial applications. The design uses separated beams and a right-angle prism for enhanced resolution and reduced errors.

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Last Updated: Jun 26, 2026

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Area of Science:

  • Optics and Photonics
  • Metrology

Background:

  • Laser interferometry is crucial for high-precision measurements.
  • Existing systems often suffer from periodic errors and complex configurations.
  • Industrial applications demand robust and accurate metrology solutions.

Purpose of the Study:

  • To develop a simple heterodyne laser interferometer with subnanometer periodic errors.
  • To enhance optical resolution and simplify the optical configuration.
  • To address limitations of current industrial metrology systems.

Main Methods:

  • Utilized two spatially separated beams to minimize periodic errors.
  • Employed a right-angle prism for a simplified optical setup.
  • Leveraged opposite phase change directions between reference and measurement signals to double optical resolution.

Main Results:

  • Achieved periodic errors below 0.15 nm.
  • Demonstrated significant reduction in periodic errors through frequency mixing analysis.
  • Successfully simplified the interferometer's optical configuration.

Conclusions:

  • The developed heterodyne laser interferometer offers high precision and simplicity for industrial use.
  • The design effectively reduces subnanometer periodic errors.
  • Further improvements in reducing optical system frequency mixing are discussed.