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Updated: Jun 26, 2026

Implementation of a Reference Interferometer for Nanodetection
Published on: April 26, 2014
Ki-Nam Joo1, Jonathan D Ellis, Jo W Spronck
1Mechatronic System Design, Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, The Netherlands. k.joo@tudelft.nl
This study presents a simple heterodyne laser interferometer with subnanometer periodic errors, suitable for industrial applications. The design uses separated beams and a right-angle prism for enhanced resolution and reduced errors.
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