Search research articles

ABOUT JoVE

Overview Leadership Blog JoVE Help Center

AUTHORS

Publishing Process Editorial Board Scope & Policies Peer Review FAQ Submit

LIBRARIANS

Testimonials Subscriptions Access Resources Library Advisory Board FAQ

RESEARCH

JoVE Journal Methods Collections JoVE Encyclopedia of Experiments Archive

EDUCATION

JoVE Core JoVE Business JoVE Science Education JoVE Lab Manual Faculty Resource Center Faculty Site

Terms & Conditions of Use

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by

Same author

Detection and distribution of anti-leptospiral antibody among dogs and their handlers.

Tropical biomedicine·2021

Same author

Sub-100 nm patterning of TiO<sub>2</sub> film for the regulation of endothelial and smooth muscle cell functions.

Biomaterials science·2020

Same author

Zernike expansion of pupil filters: optimization of the signal concentration factor.

Journal of the Optical Society of America. A, Optics, image science, and vision·2015

Same author

Optimization of pupil filters for maximal signal concentration factor.

Optics letters·2015

Same author

Focusing of vortex beams: Lommel treatment.

Journal of the Optical Society of America. A, Optics, image science, and vision·2014

Same author

Soldier defense secretions of the Malaysian termite,Hospitalioermes umbrinus (Isoptera, Nasutitermitinae).

Journal of chemical ecology·2014

Search research articles

Related Experiment Video

Updated: Jun 25, 2026

Subsurface Defect Localization by Structured Heating Using Laser Projected Photothermal Thermography

Subsurface Defect Localization by Structured Heating Using Laser Projected Photothermal Thermography

Published on: May 15, 2017

Design considerations for refractive solid immersion lens: application to subsurface integrated circuit fault

S H Goh¹, C J R Sheppard, A C T Quah

¹Centre for Integrated Circuit Failure Analysis and Reliability, National University of Singapore, Singapore. gohszuhuat@nus.edu.sg

The Review of Scientific Instruments

|February 5, 2009

Summary

This study optimizes refractive solid immersion lens (RSIL) performance for laser induced fault localization in integrated circuits. Key design parameters were identified, achieving 0.25 micrometer resolution and 15x signal enhancement for advanced failure analysis.

More Related Videos

Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging

Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging

Published on: April 11, 2025

Laser-induced Forward Transfer for Flip-chip Packaging of Single Dies

Laser-induced Forward Transfer for Flip-chip Packaging of Single Dies

Published on: March 20, 2015

Related Experiment Videos

Last Updated: Jun 25, 2026

Subsurface Defect Localization by Structured Heating Using Laser Projected Photothermal Thermography

Subsurface Defect Localization by Structured Heating Using Laser Projected Photothermal Thermography

Published on: May 15, 2017

Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging

Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging

Published on: April 11, 2025

Laser-induced Forward Transfer for Flip-chip Packaging of Single Dies

Laser-induced Forward Transfer for Flip-chip Packaging of Single Dies

Published on: March 20, 2015

Area of Science:

Integrated Circuit (IC) Technology
Optical Microscopy
Failure Analysis

Background:

Advanced integrated circuit (IC) technology leads to smaller, denser circuitries, challenging conventional laser-induced fault localization.
Existing laser-induced fault localization techniques struggle with the reduced effectiveness caused by these technological advancements.
Improved spatial resolution and sensitivity are crucial for effective failure analysis in modern ICs.

Purpose of the Study:

To identify and characterize key refractive solid immersion lens (RSIL) design parameters for optimizing laser-induced fault localization.
To understand the resolution performance of RSIL at various focal planes beyond ideal configurations.
To enhance the sensitivity and spatial resolution of laser-induced fault localization systems.

Main Methods:

Development and implementation of RSIL on a laser scanning optical microscope.
Characterization of RSIL design parameters, including focal planes and mechanical clear aperture.
Evaluation of resolution and sensitivity enhancement for laser-induced techniques.

Main Results:

Optimal RSIL performance achieved near aplanatic design (20-25 micrometers for a 1 mm lens).
Minimum numerical aperture backing objective recommended for optimal resolution.
A resolution of 0.25 micrometers was quantitatively achieved with a 0.4 micrometer pitch structure resolvable.
Approximately 15 times enhancement in laser-induced signal was obtained.

Conclusions:

RSIL design parameters significantly impact laser-induced fault localization performance.
Aplanatic RSIL designs and appropriate backing objectives are critical for achieving high resolution and sensitivity.
The developed RSIL system offers substantial improvements for failure analysis in advanced ICs.