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Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
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Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography

Published on: February 12, 2017

A conversation with Prof. George Whitesides: pioneer in soft nanolithography. Interview by Paul S. Weiss

George Whitesides

    ACS Nano
    |February 12, 2009
    PubMed
    Abstract

    No abstract available in PubMed .

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