Atomic Force Microscopy
Scanning Electron Microscopy
Overview of Microscopy Techniques
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Updated: May 1, 2026

Scanning-probe Single-electron Capacitance Spectroscopy
Published on: July 30, 2013
Dimitri S H Charrier1, Martijn Kemerink, Barry E Smalbrugge
1Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands. d.charrier@tue.nl
Scanning Kelvin probe microscopy (SKPM) measures device potential but is distorted by tip-sample interactions. This study quantitatively explains SKPM response, linking models to experimental data for accurate potential profiling.
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Published on: June 27, 2022
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