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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Visually testing the dynamic character of a blazed-angle adjustable grating by digital holographic microscopy
Chuan Qin1, Jianlin Zhao, Jianglei Di
1Institute of Optical Information Science and Technology and Shaanxi Key Laboratory of Optical Information Technology, School of Science, Northwestern Polytechnical University, Xi'an 710072, China.
Applied Optics
|February 12, 2009
Summary
Digital holographic microscopy effectively tested microoptoelectromechanical systems (MOEMS) with periodic structures. This method analyzed dynamic characteristics and microcantilever uniformity, proving its effectiveness for blazed-angle adjustable gratings.
Area of Science:
- Optoelectromechanical Systems
- Holographic Microscopy
- Nanotechnology
Background:
- Microoptoelectromechanical systems (MOEMS) are crucial for advanced optical applications.
- Testing the dynamic behavior and uniformity of MOEMS is essential for performance optimization.
- Periodic structures in MOEMS present unique challenges for traditional testing methods.
Purpose of the Study:
- To develop and validate a digital holographic microscopy technique for testing MOEMS.
- To analyze the dynamic characteristics of a blazed-angle adjustable grating MOEMS.
- To assess the uniformity of microcantilever beams within the MOEMS.
Main Methods:
- Digital holographic microscopy was employed for visual testing.
- A local area unwrapping method using a binary template was utilized for fringe demodulation.
- Holograms of the MOEMS at various deformation states (driven by different voltages) were captured.
Main Results:
- The digital holographic microscopy method demonstrated effectiveness for MOEMS with periodic structures.
- Dynamic characteristics of the blazed-angle adjustable grating were successfully analyzed.
- Uniformity inspection of microcantilever beams was achieved.
Conclusions:
- Digital holographic microscopy is a viable and effective technique for evaluating MOEMS, particularly those with periodic structures.
- The developed fringe demodulation method accurately captures MOEMS behavior under varying conditions.
- This approach provides valuable insights into MOEMS performance and reliability.
