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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Design and demonstration of compact, wide bandwidth coupled-resonator filters on a siliconon- insulator platform

Qing Li1, Mohammad Soltani, Siva Yegnanarayanan

  • 1School of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive NW, Atlanta, GA 30332-0250, USA. qli6@gatech.edu

Optics Express
|February 17, 2009
PubMed

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