Combined EBSD/EDS tomography in a dual-beam FIB/FEG-SEM
1Institute of Polymer Technology and Materials Engineering, Loughborough University, Loughborough LE11 3TU, UK. g.west@lboro.ac.uk
This study introduces an automated 3D electron backscatter diffraction (EBSD)/energy dispersive spectroscopy (EDS) method for detailed material analysis. The technique accurately maps complex microstructures, precipitates, and phase connectivity, overcoming limitations of 2D analysis.
Area of Science:
- Materials Science
- Analytical Chemistry
- Microscopy
Background:
- Characterizing complex microstructures in materials like coatings and superalloys is crucial for understanding their properties.
- Traditional 2D analysis methods can lead to ambiguities in determining 3D structural features such as grain shapes and phase interconnectivity.
- Advanced microscopy techniques are needed to provide more comprehensive and accurate material characterization.
Purpose of the Study:
- To develop and present an automated method for collecting combined three-dimensional (3D) electron backscatter diffraction (EBSD) and energy dispersive spectroscopy (EDS) data.
- To demonstrate the application of this automated 3D EBSD/EDS technique for analyzing complex material systems.
- To highlight the advantages of this method in overcoming the limitations of 2D stereographic analysis for microstructure characterization.
Main Methods:
- An automated data collection workflow was established on a dual-beam focused ion beam (FIB)/field emission gun scanning electron microscope (FEG-SEM).
- Simple scripting files were utilized to automate the movement between EBSD pattern collection and FIB slicing positions.
- Simultaneous collection of EDS data with EBSD patterns was achieved, similar to combined 2D EBSD/EDS, but enabling 3D reconstruction.
Main Results:
- The automated 3D EBSD/EDS method was successfully applied to analyze the interdiffusion zone between a coating and a substrate.
- The technique was also validated on a complex multi-phase coating on a nickel-based superalloy sample.
- Detailed 3D information regarding complex grain shapes, precipitate locations, and phase interconnectivity was obtained.
Conclusions:
- The developed automated 3D EBSD/EDS technique provides a powerful tool for high-resolution microstructural analysis.
- This method effectively resolves ambiguities inherent in 2D stereographic analysis, offering more accurate structural insights.
- The automation streamlines data acquisition, making advanced 3D materials characterization more accessible and efficient.
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