Combined EBSD/EDS tomography in a dual-beam FIB/FEG-SEM

G D West1, R C Thomson

  • 1Institute of Polymer Technology and Materials Engineering, Loughborough University, Loughborough LE11 3TU, UK. g.west@lboro.ac.uk

Journal of Microscopy
|March 3, 2009
PubMed
Summary

This study introduces an automated 3D electron backscatter diffraction (EBSD)/energy dispersive spectroscopy (EDS) method for detailed material analysis. The technique accurately maps complex microstructures, precipitates, and phase connectivity, overcoming limitations of 2D analysis.

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