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Updated: Jun 25, 2026

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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
A single-element transducer with nonuniform thickness for high-frequency broadband applications
Jian-Hung Liu1, Sheng-Yung Chen, Pai-Chi Li
1Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan.
Summary
A novel single-element annular transducer (SEAT) offers a wider bandwidth than traditional designs. While exhibiting increased insertion loss, the SEAT shows promise for advanced ultrasound imaging applications.
Area of Science:
- Ultrasound transducer technology
- Piezoelectric materials
- Acoustic engineering
Background:
- Conventional single-element transducers (SEUTs) have limitations in frequency range.
- Broadband transducers are crucial for advanced imaging modalities like harmonic imaging.
- Lithium niobate (LiNbO3) is a common piezoelectric material for high-frequency applications.
Purpose of the Study:
- To design, fabricate, and evaluate a high-frequency single-element annular transducer (SEAT).
- To compare the performance characteristics of the SEAT with a conventional SEUT.
- To assess the suitability of the SEAT for imaging applications requiring wider bandwidths.
Main Methods:
- Fabrication of a SEAT using 36 degrees-rotated, Y-cut LiNbO3 with varying thickness (60-110 microm).
- Utilized ultrasonic sculpturing for annular pattern creation, achieving surface roughness of 454.47 nm.
- Evaluated transducer characteristics including bandwidth, insertion loss, and acoustic beam pattern via simulations and experiments.
Main Results:
- The SEAT demonstrated a 19% larger bandwidth compared to the SEUT.
- A 2-way insertion loss increase of 3.1 dB was observed for the SEAT versus the SEUT.
- Finite-element simulations and experimental analysis showed good agreement for the acoustic beam pattern, with a -6 dB beam width of 108 microm at focus.
Conclusions:
- The SEAT provides a significantly broader frequency range, enhancing its utility for advanced ultrasound imaging.
- Despite increased insertion loss, the SEAT's wider bandwidth makes it suitable for applications such as harmonic imaging.
- The SEAT can be manufactured using established techniques for multi-frequency band transducers.

