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Updated: Jun 25, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Single-shot soft-x-ray digital holographic microscopy with an adjustable field of view and magnification
Ming-Chang Chou1, Ru-Ping Huang, Ping-Hsun Lin
1Institute of Atomic and MOlecular Sciences, Academia Sinica, Taipei, Taiwan.
Abstract:
Single-shot digital holographic microscopy with an adjustable field of view and magnification was demonstrated by using a tabletop 32.8 nm soft-x-ray laser. The holographic images were reconstructed with a two-dimensional fast-Fourier-transform algorithm, and a new configuration of imaging was developed to overcome the pixel-size limit of the recording device without reducing the effective NA. The image of an atomic-force-microscope cantilever was reconstructed with a lateral resolution of 480 nm, and the phase contrast image of a 20 nm carbon mesh foil demonstrated that profiles of sample thickness can be reconstructed with few-nanometers uncertainty. The ultrashort x-ray pulse duration combined with single-shot capability offers great advantage for flash imaging of delicate samples.
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