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Updated: Jun 25, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Tomohiro Kiire1, Suezou Nakadate, Masato Shibuya
1Department of Media Engineering, Graduate School of Engineering, Tokyo Polytechnic University,1583 Iiyama, Atsugi, Kanagawa 243-0297, Japan.
A new digital holography method uses a quadrature phase-shifting interferometer for high-speed measurements. This technique achieves excellent image quality with fewer devices compared to traditional methods.
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