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Updated: Jun 25, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Fano-like antiresonances in nanomechanical and optomechanical systems
1School of Physics and Astronomy, University of Nottingham, Nottingham NG7 2RD, United Kingdom.
Abstract:
We study a resonator coupled to a generic detector and calculate the noise spectra of the two subsystems. We describe the coupled system by a closed, linear, set of Langevin equations and derive a general form for the finite frequency noise of both the resonator and the detector. The resonator spectrum is the well-known thermal form with an effective damping, frequency shift and diffusion term. In contrast, the detector noise shows a rather striking Fano-like resonance; i.e., there is a resonance at the renormalized frequency and an antiresonance at the bare resonator frequency. As examples of this effect, we calculate the spectrum of a normal-state single electron transistor coupled capacitively to a resonator and of a cavity coupled parametrically to a resonator.
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