Updated: Jun 25, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Byung-Wook Yoo1, Jae-Hyoung Park, I H Park
1School of Electrical Engineering and Computer Science, Seoul National University, 301-1116(#007), Kwanak P.O. box 34, Seoul, 151-600, Republic of Korea.
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MEMS micromirrors were tested for space environments, showing no performance degradation. These reliable micromirrors are suitable for optical space systems, including satellites and the International Space Station.
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