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Updated: Jun 25, 2026

Optical Trapping of Nanoparticles

Optical Trapping of Nanoparticles

Published on: January 15, 2013

Array-based optical nanolithography using optically trapped microlenses.

Euan McLeod¹, Craig B Arnold

¹Department of Mechanical & Aerospace Engineering Princeton University, Princeton, NJ, USA.

|March 5, 2009

Summary

This summary is machine-generated.

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Array-based laser nanolithography uses microspheres and Bessel beams to create 100 nm structures. This method achieves high uniformity and positioning accuracy for advanced nanoscale fabrication.

Area of Science:

Optics
Materials Science
Nanotechnology

Background:

Optical nanolithography faces challenges in rapid, cost-effective patterning over large areas with sub-diffraction limit feature sizes.
Maintaining consistent probe-substrate separation in near-field probe arrays is difficult, especially on non-planar surfaces.

Purpose of the Study:

To demonstrate a novel array-based laser nanolithography technique for precise nanoscale fabrication.
To overcome the limitations of probe-substrate distance control in large-area nanolithography.

Main Methods:

Utilizing an array of microspheres as near-field probes.
Employing Bessel beam optical trapping for self-positioning of microspheres near a substrate.
Using 355 nm light for laser-induced fabrication of nanoscale structures.

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Trapping of Micro Particles in Nanoplasmonic Optical Lattice

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Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging

Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging

Published on: April 11, 2025

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Last Updated: Jun 25, 2026

Optical Trapping of Nanoparticles

Optical Trapping of Nanoparticles

Published on: January 15, 2013

Trapping of Micro Particles in Nanoplasmonic Optical Lattice

Trapping of Micro Particles in Nanoplasmonic Optical Lattice

Published on: September 5, 2017

Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging

Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging

Published on: April 11, 2025

Main Results:

Successful fabrication of 100 nm structures using the array-based laser nanolithography system.
Achieved feature size uniformity and relative positioning accuracy better than 15 nm.
Experimental results align well with theoretical models.

Conclusions:

Array-based laser nanolithography with Bessel beam optical trapping offers a viable solution for high-precision, large-area patterning.
The demonstrated technique shows potential for overcoming key challenges in current nanolithography demands.
Further enhancements are possible through optimization of laser power and Bessel beam properties.