[A microfabricated ICP source base on planar spiral-shaped coil]

Area of Science:

• Spectroscopy
• Plasma Physics
• Micro-electromechanical Systems (MEMS)

Context:

• Micro-electromechanical system (MEMS) technology is advancing rapidly, leading to increased interest in miniaturized optical splitting and photoelectric detection systems for spectrometers.
• However, the development of micro excitation sources for these micro spectrometers remains a significant challenge and a bottleneck in their overall progress.

Purpose:

• This study introduces a novel, low-pressure microfabricated inductively coupled plasma (ICP) source designed as an emission spectrum excitation source for micro spectrometers.
• The objective is to present a compact, efficient, and low-power excitation source that overcomes the limitations of existing technologies.

Summary:

• A novel microfabricated ICP source utilizing surface-micromachining technology is presented. This source operates at low pressure (100 Pa argon) and exhibits significantly lower radio frequency power consumption compared to conventional ICP sources.
• The design incorporates a planar spiral-shaped coil and resonant capacitors, fabricated using MEMS and printed circuit board technologies. Successful ignition of the argon plasma was achieved at 3.5 W RF power (13.56 MHz) and 100 Pa argon pressure.

Impact:

• This development is crucial for advancing micro spectrometer technology by providing a viable micro excitation source.
• The low power and gas consumption characteristics of this novel ICP source pave the way for more portable, cost-effective, and efficient analytical instruments.
• Potential applications in various fields requiring on-site elemental analysis are highlighted.