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Related Concept Videos

Scanning Electron Microscopy01:07

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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Related Experiment Video

Updated: Jun 24, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
07:24

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis

Published on: May 10, 2021

Electron channeling: a problem for x-ray microanalysis in materials science.

Frederick Meisenkothen1, Robert Wheeler, Michael D Uchic

  • 1Air Force Research Laboratory, Materials Characterization Facility, Wright Patterson Air Force Base, OH 45433, USA. frederick.meisenkothen@wpafb.af.mil

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|March 17, 2009
PubMed
Summary
This summary is machine-generated.

Electron channeling significantly impacts X-ray signals in bulk materials at low overvoltages. This effect, often overlooked, can cause up to 26% intensity variations, affecting microanalysis accuracy.

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Solid State Physics

Background:

  • Electron channeling effects cause signal variations in crystalline specimens.
  • Previous studies focused on thin foils or high overvoltages, overlooking bulk material effects.
  • Characteristic X-ray signal variations due to electron channeling are crucial for microanalysis.

Purpose of the Study:

  • To investigate electron channeling effects on characteristic X-ray signals in bulk specimens at low overvoltages.
  • To quantify the magnitude of X-ray intensity variations caused by electron channeling.
  • To highlight the impact of these variations on quantitative electron probe microanalysis.

Main Methods:

  • Low overvoltage X-ray microanalysis of bulk crystalline specimens.
  • Analysis of characteristic X-ray signal intensity variations.
  • Comparison of intensity maxima and minima due to electron channeling.

Main Results:

  • Electron channeling can produce significant X-ray intensity variations (up to 26%) in bulk specimens at low overvoltages.
  • These variations are not related to specimen composition.
  • The anomalous transmission effect is weak at these low overvoltage levels.

Conclusions:

  • Electron channeling effects on characteristic X-ray signals are significant in low overvoltage microanalysis of bulk materials.
  • These effects have been traditionally overlooked in quantitative electron probe microanalysis.
  • Accurate qualitative and quantitative microanalysis of engineering structural materials at low overvoltages requires accounting for electron channeling.