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Quantitative Optical Microscopy: Measurement of Cellular Biophysical Features with a Standard Optical Microscope
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White-light interference microscopy: minimization of spurious diffraction effects by geometric phase-shifting.

Maitreyee Roy1, Joanna Schmit, Parameswaran Hariharan

  • 1School of Physics, University of Sydney, NSW 2006, Australia. mroy@physics.usyd.edu.au

Optics Express
|March 19, 2009
PubMed
Summary

Diffraction effects in white-light interferometry cause surface profiling errors. Processing data with an achromatic phase-shifter minimizes these spikes for accurate surface height measurements.

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Area of Science:

  • Optical Metrology
  • Surface Profiling
  • Interferometry

Background:

  • White-light interferometry is susceptible to diffraction artifacts.
  • Localized spikes, or batwing artifacts, lead to inaccurate surface height measurements.

Purpose of the Study:

  • To minimize errors caused by diffraction effects in surface profiling.
  • To improve the accuracy of white-light interferometry measurements.

Main Methods:

  • Utilized an achromatic phase-shifter.
  • Processed irradiance data based on geometric (Pancharatnam) phase.
  • Applied data processing to minimize diffraction-induced spikes.

Main Results:

  • Demonstrated minimization of localized spikes (batwings).
  • Achieved more accurate surface height values.
  • Reduced errors associated with diffraction effects.

Conclusions:

  • Achromatic phase-shifting effectively reduces diffraction artifacts in interferometric surface profiling.
  • This method enhances the reliability of surface height measurements in the presence of discontinuities.