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A liquid-filled tunable double-focus microlens.

H B Yu¹, G Y Zhou, F K Chau

¹Micro/Nano Systems Initiative Technology, Department of Mechanical Engineering, National University of Singapore, Singapore. yhb_hust@vahoo.com

|March 19, 2009

Summary

This summary is machine-generated.

A new tunable double-focus microlens was created using a simple photolithography step. This innovative liquid-filled microlens design offers controllable focal lengths for advanced optical applications.

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Area of Science:

Optics and Photonics
Microfabrication Technologies

Background:

Liquid-filled microlenses offer tunable optical properties.
Existing fabrication methods can be complex and costly.

Purpose of the Study:

To present a novel microlens design with tunable double-focus capability.
To demonstrate a simplified fabrication process for this advanced microlens.

Main Methods:

Fabrication using SU-8 photolithography integrated into liquid-filled microlens processes.
Utilizing membrane deformation under uniform pressure to create distinct surface profiles.
Experimental and simulation-based analysis of optical performance.

Main Results:

Successful fabrication of a microlens exhibiting double-focus properties.
Demonstrated wide-range tunability of focal lengths through structural design and pressure control.
Validation of the design concept via experimental and simulation data.

Conclusions:

The novel microlens design enables tunable double-focus functionality.
The simplified fabrication process enhances the practicality of liquid-filled microlens technology.
This advancement holds potential for broader applications of tunable microlenses.