Parametric modeling of edge effects for polishing tool influence functions

Dae Wook Kim1, Won Hyun Park, Sug-Whan Kim

  • 1College of Optical Sciences, University of Arizona, Tucson, Arizona 85721, USA. letter2dwk@hotmail.com

Optics Express
|April 1, 2009
PubMed
Summary

A new parametric model accurately predicts the edge tool influence function (TIF) for computer-controlled polishing. This addresses nonlinear material removal when polishing tools cross workpiece edges, improving precision manufacturing.

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