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Viscous damping of perforated planar micromechanical structures
1Department of Mechanical Engineering, SUNY, Binghamton, NY 13902-6000, USA.
Sensors and Actuators. A, Physical
|September 28, 2011
Summary
This study provides an analytical approximation for viscous damping in microelectromechanical devices (MEMS). It determines the optimal number of holes in fluctuating plates to minimize damping for improved device performance.
Area of Science:
- Mechanical Engineering
- Materials Science
- Physics
Background:
- Microelectromechanical Systems (MEMS) devices like microphones and accelerometers rely on precise control of gas damping.
- Gas damping in MEMS is influenced by factors such as gas compressibility, inertia, and plate surface interactions.
- Fluctuating plates with perforated surfaces are common in MEMS, affecting their dynamic behavior.
Purpose of the Study:
- To develop an analytical approximation for the viscous damping coefficient in gas squeeze films between perforated plates.
- To determine the optimal number of circular holes for minimizing total damping in such MEMS structures.
- To provide design formulas for perforated plates used in MEMS applications.
Main Methods:
- Solving a Reynolds-type equation that incorporates gas compressibility, inertia, and slip effects.
- Deriving an analytical expression for the optimum number of circular holes.
- Analyzing the trade-off between squeeze-film damping and viscous resistance through holes.
Main Results:
- An analytical approximation for viscous damping coefficient is established.
- An expression for the optimum number of circular holes is derived, minimizing total damping.
- Analytical design formulas for regular circular perforated plates are presented.
Conclusions:
- The study offers a method to optimize MEMS damping through perforated plate design.
- The findings enable engineers to predict and control damping for enhanced MEMS device functionality.
- The provided formulas facilitate the design of more efficient and reliable MEMS components.
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