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Updated: Jun 24, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Qu Weijuan1, Yu Yingjie, Chee Oi Choo
1School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798. ququ@siom.ac.cn
A novel optical setup for digital holographic microscopy uses a single beam splitter to record holograms. This configuration allows for physical compensation of phase curvature during reconstruction, improving image quality.
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