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Updated: Jun 23, 2026

Performing In Situ Closed-Cell Gas Reactions in the Transmission Electron Microscope

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Published on: July 24, 2021

An in situ heating TEM analysis method for an interface reaction.

Toshiaki Tanigaki¹, Katsuji Ito, Yasuhira Nagakubo

¹Hitachi High-Tech Manufacturing & Service Corporation, 1040 Ichige, Hitachinaka, Ibaraki, Japan. tanigaki-toshiaki@naka.hitachi-hitec.com

Journal of Electron Microscopy

|April 21, 2009

Summary

A new in situ heating method using analytical transmission electron microscopy (TEM) enables high-resolution observation of nano-material thermal properties. This technique allows sensitive energy dispersive X-ray spectroscopic (EDX) analysis during interface reactions at the nanoscale.

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Area of Science:

Materials Science
Nanotechnology
Analytical Chemistry

Background:

Analyzing thermal properties of nano-sized materials requires advanced in situ observation techniques.
High sensitivity in energy dispersive X-ray spectroscopic (EDX) analysis is crucial for studying dynamic processes.

Purpose of the Study:

To develop a novel in situ observation method for analyzing thermal properties of nano-materials.
To enable high-resolution in situ heating observation and sensitive EDX analysis of precision specimens.

Main Methods:

Developed a method using analytical transmission electron microscopy (TEM) with a specialized specimen-heating holder.
Employed a direct-heating type holder with a fine tungsten wire heater and optimized geometry for EDX detection.
Utilized focused ion beam (FIB) micro-sampling to prepare micro-samples directly on the heater.

Main Results:

Achieved sensitive EDX mapping of composition changes during interface reactions.
Confirmed the possibility of electron diffraction analysis during in situ heating.
Demonstrated a high resolution of 0.223 nm at 550 degrees C.

Conclusions:

The developed in situ TEM heating technique is effective for analyzing thermal properties and interface reactions in nano-materials.
The method provides high spatial resolution and sensitive elemental analysis capabilities.
This technique advances the study of nanoscale material behavior under thermal stress.