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Updated: Jun 23, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
A high resolution, holographically corrected microscope with a Fresnel lens objective at large working distances
Abstract:
We present details of a microscope which incorporates an inexpensive, high numerical aperture Fresnel lens objective. The system aberrations are corrected by the use of an image hologram of the lens recorded using a point source of coherent illumination. This device gives high resolution, real time imaging while maintaining a large working distance. The same microscope can be used for micromachining and photolithography in situations where close proximity to the sample is impossible or undesirable.
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